@article{oai:toyo.repo.nii.ac.jp:00011283,
 author = {松本, 潔},
 journal = {工業技術, Industrial Technology},
 month = {Feb},
 pages = {4--16},
 title = {ピエゾ抵抗カンチレバーを用いたMEMSセンサデバイス},
 volume = {41},
 year = {2019}
}